Multi mode inspection method and apparatus
US7274444B2 · kind B2 · utility
9Cited by
97References
32Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jul 6, 2005 |
| Grant date | Sep 25, 2007 |
| Priority date | — |
| Expiry date | Jul 6, 2025 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N2021/8825
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An inspection system for inspecting an object, the system comprising an illuminator including at least one pulsed light source, a detector assembly, and a relative motion provider operative to provide motion of the object relative to the detector assembly, along an axis of motion, the detector assembly comprising a plurality of 2-dimensional detector units whose active areas are arranged at intervals.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.