Cathode assembly for indirectly heated cathode ion source
US7276847B2 · kind B2 · utility
8Cited by
17References
25Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Apr 4, 2001 |
| Grant date | Oct 2, 2007 |
| Priority date | — |
| Expiry date | Apr 4, 2021 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J27/08
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A cathode in an indirectly heated cathode ion source is supported by at least one rod or pin. The cathode is preferably in the form of a disk, and the support rod is smaller in diameter than the disk to limit thermal conduction and radiation. In one embodiment, the cathode is supported by a single rod at or near its center. The support rod may be held by a spring-action clamp for simple and reliable clamping and unclamping. The disk shaped cathode and the support rod may be fabricated as a single piece. A filament that emits electrons thermionically may be disposed around the rod in close proximity to the cathode.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.