Patent · US Expired

CMOS-compatible non-volatile memory cell with lateral inter-poly programming layer

US7294888B1 · kind B1 · utility

15Cited by

3References

14Claims

0Family size

Assignee

XILINX, INC. · US

Inventors

Sunhom Paak · Saratoga, US
Boon Yong Ang · Cupertino, US
Hsung Jai Im · San Jose, US
Daniel Gitlin · Palo Alto, US

Key dates

Filing date	Sep 30, 2005
Grant date	Nov 13, 2007
Priority date	—
Expiry date	Mar 8, 2026

Classification

Technology area (CPC G)Physics
CPC primaryG11C16/0466
WIPO fieldComputer technology
WIPO sectorElectrical engineering

Abstract

An electrically erasable programmable read-only memory (“CMOS NON-VOLATILE MEMORY”) cell is fabricated using standard CMOS fabrication processes. First and second polysilicon gates are patterned over an active area of the cell between source and drain regions. Thermal oxide is grown on the polysilicon gates to provide an isolating layer. Silicon nitride is deposited between the first and second polysilicon gates to form a lateral programming layer.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.