Thin film transistor tester and corresponding test method
US7295030B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Nov 7, 2005 |
| Grant date | Nov 13, 2007 |
| Priority date | — |
| Expiry date | Nov 7, 2025 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG09G3/006
- WIPO fieldAudio-visual technology
- WIPO sectorElectrical engineering
Abstract
To test electrical characteristics of a Thin Film Transistor (TFT) with a source or drain terminal left open and exposed, using a non-contact current source and protecting the TFTs from adverse effects, such as contamination, destruction, and the like. A tester 100 is provided to test a TFT array substrate 14, the tester including ion flow supply devices 16 and 18 for supplying an ion flow onto the surface of a substrate 14. Thereon, an array 12 of TFTs is formed, each TFT being connected to an electrode having a source or a drain left open and exposed; a control circuit 24 for supplying an operating voltage to a gate electrode of the TFT to be tested in the array; and a measurement circuit 24 for measuring an operating current via the testing TFT source or drain that remain in a non open state.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.