Fiber optic wafer probe
US7298536B2 · kind B2 · utility
11Cited by
93References
6Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Sep 7, 2005 |
| Grant date | Nov 20, 2007 |
| Priority date | — |
| Expiry date | Sep 7, 2025 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B6/3858
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A fiber optic wafer probe that includes a fibre optic cable for approaching a device under test.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.