Method and system for controlling a product parameter of a circuit element

US7299105B2 · kind B2 · utility

Assignee

• Advanced Micro Devices, Inc. · US

Inventors

• Andre Holfeld · Wilthen, DE
• Jan Raebiger · Dresden, DE
• Lutz Herrmann · Hamburg, DE

Key dates

• Filing date: Jan 6, 2005
• Grant date: Nov 20, 2007
• Expiry date: Oct 3, 2025

Classification

• Technology area (CPC H): Electricity
• CPC primary: H10D30/0227
• WIPO field: Semiconductors
• WIPO sector: Electrical engineering

Abstract

Methods and systems are disclosed that allow an adjustment of a product parameter, such as operating speed, of a circuit element, such as a field effect transistor, during the fabrication of the device. A manufacturing process downstream of a first controlled process is controlled by a superior control scheme in response to the measurement data of the first and second processes and on the basis of a sensitivity function, which describes the effect a variation of the product parameter generates in the measurement data. The superior control scheme may provide a compensated target value for the downstream process.