Inventor · Dresden, DE

Jan Raebiger

10Patents
3h-index
13Co-inventors
53Inventor score

Filing activity: Nov 6, 1998 → Mar 31, 2009

Most-cited inventions

PatentTitleAreaCited byStatus
US6821859B2 Method and system for controlling an electrical property of a field effect transistor Electricity 13 Expired
US6096628A Method of controlling effective channel length of semiconductor device by non-doping implantation at elevated energies Emerging Cross-Sectional Technologies 12 Expired
US7041434B2 Technique for enhancing accuracy of critical dimensions of a gate electrode by using characteristics of an ARC layer Physics 8 Expired
US7299105B2 Method and system for controlling a product parameter of a circuit element Electricity 3 Expired
US8155770B2 Method and apparatus for dispatching workpieces to tools based on processing and performance history Emerging Cross-Sectional Technologies 3 Active
US6879871B2 Advanced process control for a manufacturing process of a plurality of products with minimized control degradation after re-initialization upon occurrence of reset events Emerging Cross-Sectional Technologies 3 Expired
US7006195B2 Method and system for improving exposure uniformity in a step and repeat process Physics 2 Expired
US6946411B2 Method and system for improving the efficiency of a mechanical alignment tool Emerging Cross-Sectional Technologies 2 Expired
US7268000B2 Method and system for controlling the chemical mechanical polishing of substrates by calculating an overpolishing time and/or a polishing time of a final polishing step Performing Operations; Transporting 0 Expired
US7346407B2 Method of operating an advanced process controller by dynamically adapting hierarchy levels Emerging Cross-Sectional Technologies 0 Expired

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.