Method and apparatus for fast disturbance detection and classification
US7299154B1 · kind B1 · utility
5Cited by
5References
25Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | May 16, 2005 |
| Grant date | Nov 20, 2007 |
| Priority date | — |
| Expiry date | May 16, 2025 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG05B23/0294
- WIPO fieldControl
- WIPO sectorInstruments
Abstract
The present invention provides a method and apparatus for detecting step and impulse disturbances. The method includes determining a pattern based on a plurality of probabilities associated with a corresponding plurality of wafer processing parameters and determining a type of a disturbance based upon the pattern.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.