Patent · US Expired

Micro thermal chamber having proximity control temperature management for devices under test

US7304264B2 · kind B2 · utility

3Cited by
8References
26Claims
0Family size

Assignee

Inventor

Key dates

Filing dateApr 13, 2004
Grant dateDec 4, 2007
Priority date—
Expiry dateApr 13, 2024

Classification

  • Technology area (CPC G)Physics
  • CPC primaryG01R31/2877
  • WIPO fieldMeasurement
  • WIPO sectorInstruments

Abstract

A temperature unit to control a temperature of a device under test using a fluid includes a block disposed opposite the device under test and which defines a gap therebetween and through which the fluid passes across the device under test at a gap flow rate, and an actuator which moves the block. By adjusting the gap, the gap flow rate of the fluid flowing over the device under test changes so as to adjust the temperature of the device under test. Additionally, the block can be a heater block which generates heat receivable by the device under test across the gap such that the adjustment of the heater block by the actuator changes a thermal resistance across the gap.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.