Shambhu N. Roy
23Patents
10h-index
41Co-inventors
71Inventor score
Filing activity: Aug 5, 1999 → Jun 18, 2018
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US8390980B2 | Electrostatic chuck assembly | Electricity | 169 | Active |
| US9728437B2 | High temperature chuck for plasma processing systems | Electricity | 117 | Active |
| US10271686B2 | Kitchen in a box cooking appliance with selectably engaged independent stirring and heating control for a plurality of cooking stations | Human Necessities | 42 | Active |
| US6648583B1 | Parallel kinematics mechanism with a concentric spherical joint | Emerging Cross-Sectional Technologies | 37 | Expired |
| US7331750B2 | Parallel robot | Emerging Cross-Sectional Technologies | 27 | Expired |
| US6602042B2 | Parallel kinematics mechanism with a concentric spherical joint | Emerging Cross-Sectional Technologies | 26 | Expired |
| US6497548B1 | Parallel kinematics mechanism with a concentric sperical joint | Emerging Cross-Sectional Technologies | 26 | Expired |
| US9131807B2 | Robotic kitchen top cooking apparatus and method for preparation of dishes using computer recipies | Emerging Cross-Sectional Technologies | 20 | Active |
| US9447499B2 | Dual plenum, axi-symmetric showerhead with edge-to-center gas delivery | Chemistry; Metallurgy | 17 | Active |
| US8559159B2 | Electrostatic chuck and methods of use thereof | Electricity | 16 | Active |
| US9337067B2 | High temperature electrostatic chuck with radial thermal chokes | Electricity | 10 | Active |
| US9484202B1 | Apparatus and methods for spacer deposition and selective removal in an advanced patterning process | Electricity | 9 | Active |
| US6740998B2 | Single motor, multi-axis stage | Emerging Cross-Sectional Technologies | 8 | Expired |
| US9818585B2 | In situ plasma clean for removal of residue from pedestal surface without breaking vacuum | Electricity | 6 | Active |
| US9643324B1 | Multi-axis robot with remote drives facilitating hazardous energy isolation for use by home consumers | Performing Operations; Transporting | 4 | Active |
| US8900471B2 | In situ plasma clean for removal of residue from pedestal surface without breaking vacuum | Electricity | 4 | Active |
| US7304264B2 | Micro thermal chamber having proximity control temperature management for devices under test | Physics | 3 | Expired |
| US9064911B2 | Heated cooling plate for E-chucks and pedestals | Electricity | 3 | Active |
| US7337691B2 | Parallel kinematics mechanism with a concentric spherical joint | Emerging Cross-Sectional Technologies | 2 | Expired |
| US10879094B2 | Electrostatic chucking force measurement tool for process chamber carriers | Electricity | 1 | Active |
| US10589423B2 | Robot vision super visor for hybrid homing, positioning and workspace UFO detection enabling industrial robot use for consumer applications | Performing Operations; Transporting | 0 | Active |
| US10468285B2 | High temperature chuck for plasma processing systems | Electricity | 0 | Active |
| US9382625B2 | Remote plasma source based cyclic CVD process for nanocrystalline diamond deposition | Chemistry; Metallurgy | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.