Patent · US Active

Rotating or rotatable compensator system providing aberation corrected electromagnetic raadiation to a spot on a sample at multiple angles of a incidence

US7304737B1 · kind B1 · utility

7Cited by

67References

17Claims

0Family size

Assignee

J.A. WOOLLAM CO., INC. · US

Inventors

Martin M. Liphardt · Lincoln, US
Blaine D. Johs · Lincoln, US
Jeffrey S. Hale · Lincoln, US
Craig M. Herzinger · Lincoln, US
Steven E. Green · Lincoln, US
Ping He · Lincoln, US
John A. Woollam · Lincoln, US

Key dates

Filing date	Aug 3, 2006
Grant date	Dec 4, 2007
Priority date	—
Expiry date	Aug 4, 2026

Classification

Technology area (CPC G)Physics
CPC primaryG01N2021/215
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

Spectroscopic ellipsometer systems which include polarizer and analyzer elements which remain fixed in position during data acquisition while at least one continuously rotating or step-wise rotatable compensator imposes a continuously variable or plurality of sequentially discrete polarization states on a beam of electromagnetic radiation, including a system of mirrors and refractive elements for correcting aberation while directing a beam of electromagnetic radiation to a spot on a sample at a multiple different angles-of-incidence.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.