Method and apparatus for bandwidth measurement and bandwidth parameter calculation for laser light
US7304748B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Feb 27, 2004 |
| Grant date | Dec 4, 2007 |
| Priority date | — |
| Expiry date | Jun 1, 2025 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01J3/26
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A bandwidth meter method and apparatus for measuring the bandwidth of a spectrum of light emitted from a laser input to the bandwidth meter is disclosed, which may comprise an optical bandwidth monitor providing a first output representative of a first parameter which is indicative of the bandwidth of the light emitted from the laser and a second output representative of a second parameter which is indicative of the bandwidth of the light emitted from the laser; and, an actual bandwidth calculation apparatus utilizing the first output and the second output as part of a multivarible equation employing predetermined calibration variables specific to the optical bandwidth monitor, to calculate an actual bandwidth parameter. The apparatus and method may be implemented in a laser lithography light source and/or in an integrated circuit lithography tool.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.