Robert Jay Rafac
51Patents
7h-index
38Co-inventors
68Inventor score
Filing activity: Jun 26, 2003 → Jan 25, 2022
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US7088758B2 | Relax gas discharge laser lithography light source | Electricity | 27 | Expired |
| US8872143B2 | Target for laser produced plasma extreme ultraviolet light source | Electricity | 17 | Active |
| US8791440B1 | Target for extreme ultraviolet light source | Electricity | 16 | Active |
| US8014432B2 | Regenerative ring resonator | Electricity | 11 | Active |
| US8520186B2 | Active spectral control of optical source | Physics | 10 | Active |
| US7317536B2 | Spectral bandwidth metrology for high repetition rate gas discharge lasers | Physics | 8 | Expired |
| US8680495B1 | Extreme ultraviolet light source | Electricity | 7 | Active |
| US9232623B2 | Extreme ultraviolet light source | Physics | 6 | Active |
| US8927952B2 | Target for laser produced plasma extreme ultraviolet light source | Electricity | 6 | Active |
| US8624209B1 | Controlling spatial properties in an excimer ring amplifier | Electricity | 6 | Active |
| US7304748B2 | Method and apparatus for bandwidth measurement and bandwidth parameter calculation for laser light | Physics | 6 | Expired |
| US9713240B2 | Stabilizing EUV light power in an extreme ultraviolet light source | Electricity | 6 | Active |
| US9239269B1 | Calibration of photoelectromagnetic sensor in a laser source | Physics | 5 | Active |
| US9832852B1 | EUV LPP source with dose control and laser stabilization using variable width laser pulses | Electricity | 5 | Active |
| US7639364B2 | Methods and apparatus for bandwidth measurement and bandwidth parameter calculation for laser light | Physics | 5 | Active |
| US9820368B2 | Target expansion rate control in an extreme ultraviolet light source | Electricity | 4 | Active |
| US7256893B2 | Method and apparatus for measuring bandwidth of an optical spectrum output of a very small wavelength very narrow bandwidth high power laser | Electricity | 4 | Expired |
| US7684046B2 | Method and apparatus for bandwidth measurement and bandwidth parameter calculation for laser light | Physics | 4 | Active |
| US9426872B1 | System and method for controlling source laser firing in an LPP EUV light source | Electricity | 4 | Active |
| US8866110B2 | Extreme ultraviolet light source | Electricity | 3 | Active |
| US8563956B1 | Intracavity loss element for power amplifier | Electricity | 3 | Active |
| US9239268B1 | Calibration of photoelectromagnetic sensor in a laser source | Electricity | 2 | Active |
| US10314153B2 | Target expansion rate control in an extreme ultraviolet light source | Electricity | 2 | Active |
| USRE45957E1 | Regenerative ring resonator | General | 2 | Active |
| US9516729B2 | Variable radius mirror dichroic beam splitter module for extreme ultraviolet source | Electricity | 2 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.