Lithographic apparatus, reticle masking device for a lithographic apparatus, gas bearing and apparatus comprising such gas bearing
US7307689B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Dec 29, 2004 |
| Grant date | Dec 11, 2007 |
| Priority date | — |
| Expiry date | Nov 8, 2025 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F7/70066
- WIPO fieldMechanical elements
- WIPO sectorMechanical engineering
Abstract
A lithographic apparatus includes a guiding mechanism to guide a movable structure such as a mask blade of a reticle masking device, a movable part connected to the movable structure, and a substantially stationary part to guide the movable part. The movable part includes a nozzle to inject a gas in a gap between the movable and stationary parts, a contactless supply of the gas from the stationary part to the movable part being provided by a gas supply outlet in the stationary part and a gas supply inlet in the movable part. The gas supply outlet includes an inlet trench in a surface of the movable part facing the gas supply outlet of the stationary part, the trench being orientated parallel to a direction of movement of the movable part. The movable part includes a motor drive part and a counter weight part connected to an end of the motor drive part facing away from the movable structure.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.