Patent · US Expired

System for inspecting a surface employing configurable multi angle illumination modes

US7315364B2 · kind B2 · utility

2Cited by
5References
12Claims
0Family size

Assignee

Inventors

Key dates

Filing dateMay 5, 2005
Grant dateJan 1, 2008
Priority date—
Expiry dateAug 23, 2025

Classification

  • Technology area (CPC G)Physics
  • CPC primaryG01N21/9501
  • WIPO fieldMeasurement
  • WIPO sectorInstruments

Abstract

Apparatus for inspection of a surface, the apparatus including an objective having central and peripheral regions, which is positioned to focus an input beam through the central region in a normal direction onto the surface. The apparatus further includes a first periscope which is positionable to divert the input beam so as to pass through the peripheral region of the objective, whereby the objective focuses the input beam in an oblique direction onto the surface. There is also a second periscope which is positionable to capture radiation reflected from the surface in the oblique direction after passage of the reflected radiation through the peripheral region of the objective.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.