Substrate container

US7316325B2 · kind B2 · utility

Assignee

• ENTEGRIS, INC. · US

Inventors

• John Burns · Colorado Springs, US
• Matthew A. Fuller · Colorado Springs, US
• Jeffery J. King · Cocoa, US
• Martin L. Forbes · Divide, US
• Mark V. Smith · Colorado Springs, US

Key dates

• Filing date: Nov 5, 2004
• Grant date: Jan 8, 2008
• Expiry date: Feb 10, 2026

Classification

• Technology area (CPC H): Electricity
• CPC primary: H01L21/67396
• WIPO field: Semiconductors
• WIPO sector: Electrical engineering

Abstract

A substrate carrier to dissipate electrostatic charge has a conductive grid or network overmolded in a substantially integral container. The grid is electrically connected to an underlying and grounded saddle. The carrier may further include substantially transparent side walls and electrically conductive shelves to retain stored substrates in a generally axial alignment.