Spectral bandwidth metrology for high repetition rate gas discharge lasers
US7317536B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Jun 27, 2005 |
| Grant date | Jan 8, 2008 |
| Priority date | — |
| Expiry date | Jan 8, 2026 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01J3/28
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A bandwidth meter apparatus and method for measuring the bandwidth of a spectrum of light emitted from a laser input to the bandwidth meter which may comprise an optical bandwidth monitor providing a first output representative of a first parameter which is indicative of the bandwidth or the light emitted from the laser and a second output representative of a second parameter which is indicative or the bandwidth of the light emitted from the laser; and, an actual bandwidth calculation apparatus utilizing the first output and the second output as part of a multivariable equation employing predetermined calibration variables specific to the optical bandwidth monitor, to calculate an actual bandwidth parameter; the multivariable equation comprising a symmetry sensitive term.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.