Patent · US Expired

Electronic component comprising an electrically conductive connection consisting of carbon nanotubes and a method for producing the same

US7321097B2 · kind B2 · utility

9Cited by

6References

10Claims

0Family size

Assignee

Infineon Technologies AG · DE

Inventors

Manfred Engelhardt · Feldkirchen-Westerham, DE
Wolfgang Hönlein · Unterhaching, DE
Franz Kreupl · Mountain View, US

Key dates

Filing date	Feb 2, 2001
Grant date	Jan 22, 2008
Priority date	—
Expiry date	Feb 2, 2021

Classification

Technology area (CPC H)Electricity
CPC primaryH05K3/4076
WIPO fieldSemiconductors
WIPO sectorElectrical engineering

Abstract

The invention provides in a preferred embodiment an electronic component comprising a first conductive layer, a non-conductive layer and a second conductive layer. A hole is etched through the non-conductive layer. A nanotube, which is provided in said hole, links the first conductive layer to the second conductive layer in a conductive manner.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.