Process for manufacturing a triaxial piezoresistive accelerometer and relative pressure-monitoring device
US7322236B2 · kind B2 · utility
28Cited by
7References
24Claims
0Family size
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Key dates
| Filing date | Jan 24, 2006 |
| Grant date | Jan 29, 2008 |
| Priority date | — |
| Expiry date | Jan 24, 2026 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01P2015/084
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A manufacturing process of a semiconductor piezoresistive accelerometer includes the steps of: providing a wafer of semiconductor material; providing a membrane in the wafer over a cavity; rigidly coupling an inertial mass to the membrane; and providing, in the wafer, piezoresistive transduction elements, that are sensitive to strains of the membrane and generate corresponding electrical signals. The step of coupling is carried out by forming the inertial mass on top of a surface of the membrane opposite to the cavity. The accelerometer is advantageously used in a device for monitoring the pressure of a tire of a vehicle.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.