Wafer container door with particulate collecting structure
US7325698B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Apr 17, 2005 |
| Grant date | Feb 5, 2008 |
| Priority date | — |
| Expiry date | May 3, 2025 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S206/832
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A substrate container having an enclosure with an access opening for inserting and removing substrates into an interior of the enclosure and a door chassis that is configured to selectively enclose the opening, the door chassis comprising a first wall having a peripheral wall extending therefrom. The substrate container includes a latch mechanism that is operably coupled with the chassis, the latch mechanism configured to operably secure the chassis to the opening. The door of the substrate container includes a textured particle capture region wherein particles generated by the latch mechanism and elsewhere are captured by the particle capture region.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.