David L. Halbmaier
12Patents
8h-index
18Co-inventors
65Inventor score
Filing activity: Jan 8, 1999 → Dec 23, 2013
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US7607543B2 | Reticle pod with isolation system | Electricity | 26 | Active |
| US7400383B2 | Environmental control in a reticle SMIF pod | Electricity | 20 | Expired |
| US6248177A | Method of cleaning a wafer carrier | Emerging Cross-Sectional Technologies | 18 | Expired |
| US6926017B2 | Wafer container washing apparatus | Emerging Cross-Sectional Technologies | 17 | Expired |
| US7328727B2 | Substrate container with fluid-sealing flow passageway | Electricity | 14 | Expired |
| US8231005B2 | Reticle pod | Electricity | 14 | Active |
| US7528936B2 | Substrate container with pressure equalization | Electricity | 12 | Active |
| US8727125B2 | Substrate container with fluid-sealing flow passageway | Electricity | 11 | Active |
| US7325698B2 | Wafer container door with particulate collecting structure | Emerging Cross-Sectional Technologies | 7 | Expired |
| US7216655B2 | Wafer container washing apparatus | Emerging Cross-Sectional Technologies | 6 | Expired |
| US8613359B2 | Reticle pod | Electricity | 5 | Active |
| US9745119B2 | Reticle pod | Electricity | 3 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.