Inventor · Shorewood, MN, US

David L. Halbmaier

12Patents
8h-index
18Co-inventors
65Inventor score

Filing activity: Jan 8, 1999 → Dec 23, 2013

Most-cited inventions

PatentTitleAreaCited byStatus
US7607543B2 Reticle pod with isolation system Electricity 26 Active
US7400383B2 Environmental control in a reticle SMIF pod Electricity 20 Expired
US6248177A Method of cleaning a wafer carrier Emerging Cross-Sectional Technologies 18 Expired
US6926017B2 Wafer container washing apparatus Emerging Cross-Sectional Technologies 17 Expired
US7328727B2 Substrate container with fluid-sealing flow passageway Electricity 14 Expired
US8231005B2 Reticle pod Electricity 14 Active
US7528936B2 Substrate container with pressure equalization Electricity 12 Active
US8727125B2 Substrate container with fluid-sealing flow passageway Electricity 11 Active
US7325698B2 Wafer container door with particulate collecting structure Emerging Cross-Sectional Technologies 7 Expired
US7216655B2 Wafer container washing apparatus Emerging Cross-Sectional Technologies 6 Expired
US8613359B2 Reticle pod Electricity 5 Active
US9745119B2 Reticle pod Electricity 3 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.