Substrate container with fluid-sealing flow passageway
US7328727B2 · kind B2 · utility
14Cited by
26References
8Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Apr 17, 2005 |
| Grant date | Feb 12, 2008 |
| Priority date | — |
| Expiry date | Apr 17, 2025 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/67126
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A substrate container includes an enclosure and an access structure formed in the enclosure and providing fluid access through the enclosure to an interior of the substrate container. The access structure includes an opening and an inner surface. A grommet is situated against the inner surface of the access structure.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.