EUV illumination system having a plurality of light sources for illuminating an optical element

US7329886B2 · kind B2 · utility

Assignee

• Carl Zeiss SMT GmbH · DE

Inventors

• Wolfgang Singer · Aalen, DE
• Martin Antoni · Aalen, DE
• Nils Dieckmann · Wertingen, DE
• Dirk Rothweiler · Phra Pradaeng, TH
• Jorg Schultz · Aalen, DE

Key dates

• Filing date: Jan 12, 2004
• Grant date: Feb 12, 2008
• Expiry date: Mar 29, 2024

Classification

• Technology area (CPC G): Physics
• CPC primary: G21K5/00
• WIPO field: Optics
• WIPO sector: Instruments

Abstract

There is provided an illumination system. The illumination system includes a first light source and a second light source, each of which are for providing light having a wavelength ≦193 nm, and an optical element. The first light source illuminates a first area of the optical element and the second light source illuminates a second area of the optical element.