Simulation of aerial images
US7331033B2 · kind B2 · utility
7Cited by
3References
13Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Aug 27, 2004 |
| Grant date | Feb 12, 2008 |
| Priority date | — |
| Expiry date | Aug 28, 2025 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F1/36
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A method for generating a simulated aerial image of a mask projected by an optical system includes determining a coherence characteristic of the optical system. A coherent decomposition of the optical system is computed based on the coherence characteristic. The decomposition includes a series of expansion functions having angular and radial components that are expressed as explicit functions. The expansion functions are convolved with a transmission function of the mask in order to generate the simulated aerial image.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.