Sensor device for non-intrusive diagnosis of a semiconductor processing system
US7331250B2 · kind B2 · utility
26Cited by
56References
24Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Sep 6, 2006 |
| Grant date | Feb 19, 2008 |
| Priority date | — |
| Expiry date | Sep 6, 2026 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T29/49769
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A battery powered sensing device for diagnosing a processing system and method for using the same are provided. The support platform generally has physical characteristics, such as size, profile height, mass, flexibility and/or strength, substantially similar to those of the substrates that are to be processed in the processing system, so the sensor device can be transferred through the processing system in a manner similar to the manner in which production substrates are transferred through the processing system.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.