Automated design and execution of experiments with integrated model creation for semiconductor manufacturing tools
US7333871B2 · kind B2 · utility
50Cited by
317References
34Claims
0Family size
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Key dates
| Filing date | Jan 20, 2004 |
| Grant date | Feb 19, 2008 |
| Priority date | — |
| Expiry date | Jan 20, 2024 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG05B17/02
- WIPO fieldControl
- WIPO sectorInstruments
Abstract
A method, system and medium of automation performed on a semiconductor manufacturing tool. The method creates a designed set of experiments for the tool and runs the created set of experiments. The method also collects data resulting from running the experiments and creates a model based on the collected data. The created model is used in automatically controlling the tool.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.