Alexander T. Schwarm
33Patents
15h-index
38Co-inventors
77Inventor score
Filing activity: Aug 31, 2001 → Apr 24, 2020
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US6913938B2 | Feedback control of plasma-enhanced chemical vapor deposition processes | Emerging Cross-Sectional Technologies | 83 | Expired |
| US7082345B2 | Method, system and medium for process control for the matching of tools, chambers and/or other semiconductor-related entities | Emerging Cross-Sectional Technologies | 63 | Expired |
| US7333871B2 | Automated design and execution of experiments with integrated model creation for semiconductor manufacturing tools | Physics | 50 | Expired |
| US7201936B2 | Method of feedback control of sub-atmospheric chemical vapor deposition processes | Emerging Cross-Sectional Technologies | 44 | Expired |
| US7337019B2 | Integration of fault detection with run-to-run control | Emerging Cross-Sectional Technologies | 42 | Expired |
| US6999836B2 | Method, system, and medium for handling misrepresentative metrology data within an advanced process control system | Physics | 39 | Expired |
| US7783375B2 | Dynamic metrology schemes and sampling schemes for advanced process control in semiconductor processing | Emerging Cross-Sectional Technologies | 34 | Active |
| US7356377B2 | System, method, and medium for monitoring performance of an advanced process control system | Physics | 34 | Expired |
| US7725208B2 | Dynamic metrology schemes and sampling schemes for advanced process control in semiconductor processing | Emerging Cross-Sectional Technologies | 33 | Active |
| US7160739B2 | Feedback control of a chemical mechanical polishing device providing manipulation of removal rate profiles | Emerging Cross-Sectional Technologies | 29 | Expired |
| US7272459B2 | Method, system and medium for controlling manufacture process having multivariate input parameters | Emerging Cross-Sectional Technologies | 28 | Expired |
| US7047099B2 | Integrating tool, module, and fab level control | Emerging Cross-Sectional Technologies | 27 | Expired |
| US7596718B2 | Ranged fault signatures for fault diagnosis | Physics | 17 | Active |
| US7587296B2 | Adaptive multivariate fault detection | Emerging Cross-Sectional Technologies | 16 | Active |
| US7937179B2 | Dynamic inline yield analysis and prediction of a defect limited yield using inline inspection defects | Emerging Cross-Sectional Technologies | 15 | Active |
| US8010321B2 | Metrics independent and recipe independent fault classes | Physics | 14 | Active |
| US7698012B2 | Dynamic metrology schemes and sampling schemes for advanced process control in semiconductor processing | Emerging Cross-Sectional Technologies | 14 | Expired |
| US7831326B2 | Graphical user interface for presenting multivariate fault contributions | Emerging Cross-Sectional Technologies | 9 | Active |
| US7962864B2 | Stage yield prediction | Physics | 8 | Active |
| US8070909B2 | Feedback control of chemical mechanical polishing device providing manipulation of removal rate profiles | Emerging Cross-Sectional Technologies | 8 | Active |
| US7966087B2 | Method, system and medium for controlling manufacture process having multivariate input parameters | Emerging Cross-Sectional Technologies | 6 | Active |
| US7765020B2 | Graphical user interface for presenting multivariate fault contributions | Emerging Cross-Sectional Technologies | 5 | Active |
| US7934125B2 | Ranged fault signatures for fault diagnosis | Physics | 5 | Active |
| US8799831B2 | Inline defect analysis for sampling and SPC | Physics | 5 | Active |
| US7668702B2 | Method, system and medium for controlling manufacturing process using adaptive models based on empirical data | Physics | 3 | Expired |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.