Method and device for aligning a charged particle beam column
US7335893B2 · kind B2 · utility
2Cited by
10References
34Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Oct 4, 2002 |
| Grant date | Feb 26, 2008 |
| Priority date | — |
| Expiry date | Feb 9, 2023 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/221
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
The invention provides a method for automatically aligning a beam of charged particles with an aperture. Thereby, a defocusing is introduced and a signal calculated based on an image shift is applied to a deflection unit. Further, a method for correction of astigmatism is provided. Thereby, the sharpness is evaluated for a set of frames generated whilst varying the signals to a stigmator.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.