Patent · US Active

Spectroscopic ellipsometer and polarimeter systems

US7336361B1 · kind B1 · utility

11Cited by

54References

26Claims

0Family size

Assignee

J.A. WOOLLAM CO., INC. · US

Inventors

Martin M. Liphardt · Lincoln, US
Blaine D. Johs · Lincoln, US
Jeffrey S. Hale · Lincoln, US
Craig M. Herzinger · Lincoln, US
Steven E. Green · Lincoln, US
Ping He · Lincoln, US
John A. Woollam · Lincoln, US

Key dates

Filing date	Oct 25, 2005
Grant date	Feb 26, 2008
Priority date	—
Expiry date	Jul 26, 2026

Classification

Technology area (CPC G)Physics
CPC primaryG01N2021/213
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

A spectroscopic ellipsometer or polarimeter system having a source of a polychromatic beam of electromagnetic radiation, a polarizer, a stage for supporting a material system, an analyzer, a dispersive optics and a detector system which comprises a multiplicity of detector elements, there being apertures before the stage for supporting a material system, and thereafter, the system further having at least one multi-element lens and optionally being present in an environmental control chamber.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.