Patent · US Active

Apparatus for projecting a pattern into an image plane

US7339652B2 · kind B2 · utility

6Cited by

2References

22Claims

0Family size

Assignee

Infineon Technologies AG · DE

Inventors

Molela Moukara · Munich, DE
Rainer Pforr · Dresden, DE
Thomas Muelders · Dresden, DE
Mario Hennig · Dresden, DE
Karsten Zeiler · Birkenfeld, DE

Key dates

Filing date	Jan 26, 2006
Grant date	Mar 4, 2008
Priority date	—
Expiry date	Aug 14, 2026

Classification

Technology area (CPC G)Physics
CPC primaryG03F7/70125
WIPO fieldOptics
WIPO sectorInstruments

Abstract

An improvement of the imaging quality with simultaneous transfer of line-space gratings and peripheral structures including a MUX space is achieved using a quadrupole illumination whose poles are formed in elongate fashion and whose longitudinal axes are arranged perpendicular to the orientation of the lines of the line-space grating arranged on a mask. The structure imaging of the line-space grating is improved with regard to contrast, MEEF, and process window, while the geometrical fidelity of the peripheral structure, in particular of the MUX space, is stabilized over a wide depth of field range.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.