Electrodes for fluorine gas discharge lasers
US7339973B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Sep 26, 2003 |
| Grant date | Mar 4, 2008 |
| Priority date | — |
| Expiry date | Jan 6, 2025 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01S3/2251
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
Fluorine gas discharge laser electrodes and electrode systems that may comprise a plurality of current return tangs extending for less than the respective length of the second elongated gas discharge electrode. In addition electrodes may comprise a first discharge shaping magnet mounted in a first elongated gas discharge electrode and a second discharge shaping magnet mounted in a second elongated gas discharge electrode. Also is an electrode may comprise a crown straddling the centerline axis between the pair of side walls and the pair of end walls, comprising a first material, forming at least a portion of the discharge region of the electrode and a pair of elongated high erosion regions on either side of the crown comprising a second material with a relatively higher erosion rate during gas discharge than that of the first material.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.