Wafer carrier with apertured door for cleaning

US7344030B2 · kind B2 · utility

Assignee

• ENTEGRIS, INC. · US

Inventors

• John Burns · Colorado Springs, US
• Matthew A. Fuller · Colorado Springs, US
• Jeffery J. King · Cocoa, US
• Martin L. Forbes · Divide, US
• Mark V. Smith · Colorado Springs, US

Key dates

• Filing date: Nov 5, 2004
• Grant date: Mar 18, 2008
• Expiry date: Nov 20, 2024

Classification

• Technology area (CPC H): Electricity
• CPC primary: H01L21/67386
• WIPO field: Semiconductors
• WIPO sector: Electrical engineering

Abstract

A wafer carrier door having an inner door portion and an outer door portion. The inner door portion has a substantially continuous inner surface. The outer door portion extends over at least a portion of the inner door portion. The outer door portion has a plurality of apertures formed therein. The outer door portion is attached to the inner door portion.