Method and system for refurbishing a metal carbonyl precursor
US7345184B2 · kind B2 · utility
Assignees
Inventors
Key dates
| Filing date | Mar 31, 2005 |
| Grant date | Mar 18, 2008 |
| Priority date | — |
| Expiry date | Aug 19, 2026 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC23C16/45593
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
A method and system for refurbishing a metal carbonyl precursor. The method includes providing a metal precursor vaporization system containing a metal carbonyl precursor containing un-reacted and partially reacted metal carbonyl precursor, flowing a CO-containing gas through the metal precursor vaporization system to a precursor collection system in fluid communication with the metal precursor vaporization system to transfer the un-reacted metal carbonyl precursor vapor to the precursor collection system, and collecting the transferred metal carbonyl precursor in the precursor collection system. A method is provided for monitoring at least one metal carbonyl precursor parameter to determine a status of the metal carbonyl precursor and the need for refurbishing the metal carbonyl precursor.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.