Substrate carrier handler that unloads substrate carriers directly from a moving conveyer
US7346431B2 · kind B2 · utility
13Cited by
151References
23Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Oct 31, 2006 |
| Grant date | Mar 18, 2008 |
| Priority date | — |
| Expiry date | Oct 31, 2026 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB65G2201/0297
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
In a first aspect, a substrate loading station is served by a conveyor which continuously transports substrate carriers. A substrate carrier handler that is part of the substrate loading station operates to exchange substrate carriers with the conveyor while the conveyor is in motion. A carrier exchange procedure may include moving an end effector of the substrate carrier handler at a velocity that substantially matches a velocity of the conveyor. Numerous other aspects are provided.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.