Substrate carrier
US7347329B2 · kind B2 · utility
15Cited by
18References
14Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Oct 22, 2004 |
| Grant date | Mar 25, 2008 |
| Priority date | — |
| Expiry date | Jan 15, 2025 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S206/832
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A carrier for transporting silicon semiconductor wafers during semiconductor wafer processing operations including an enclosure, a door and a flange structured to interface with a machine so that the carrier can be lifted by the machine. A lift saddle connects the flange to the container so that the load on the flange is transferred to a part of the enclosure other than the top of the enclosure to prevent distortion of the enclosure to maintaining seal integrity between the enclosure and the door.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.