Thermally zoned substrate holder assembly
US7347901B2 · kind B2 · utility
14Cited by
11References
4Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Nov 26, 2003 |
| Grant date | Mar 25, 2008 |
| Priority date | — |
| Expiry date | Jul 1, 2024 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T279/23
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A thermally zoned substrate holder including a substantially cylindrical base having top and bottom surfaces configured to support a substrate. A plurality of temperature control elements are disposed within the base. An insulator thermally separates the temperature control elements. The insulator is made from an insulting material having a lower coefficient of thermal conductivity than the base (e.g., a gas-or vacuum-filled chamber).
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.