Probing card and inspection apparatus for microstructure
US7348788B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Mar 31, 2006 |
| Grant date | Mar 25, 2008 |
| Priority date | — |
| Expiry date | Mar 31, 2026 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB81C99/005
- WIPO fieldMicro-structural and nano-technology
- WIPO sectorChemistry
Abstract
A probing card and an inspection apparatus which precisely inspect a microstructure having a minute moving section by a simple method are provided. A probing card (6) has a speaker (2), and a circuit substrate (100) which fixes a probe (4), and the speaker (2) is disposed on the circuit substrate (100). The circuit substrate (100) is provided with an aperture region. As the speaker (2) is disposed on that region, a test sound wave is output to the moving section of the microstructure. The probe (4) detects a change in an electrical characteristic caused by the motion of the moving section according to the test sound wave, thereby inspecting the characteristic of the microstructure.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.