System, method, and medium for monitoring performance of an advanced process control system
US7356377B2 · kind B2 · utility
34Cited by
321References
53Claims
0Family size
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Key dates
| Filing date | Jan 29, 2004 |
| Grant date | Apr 8, 2008 |
| Priority date | — |
| Expiry date | May 27, 2025 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG05B23/0294
- WIPO fieldControl
- WIPO sectorInstruments
Abstract
A method for monitoring performance of an advanced process control system for at least one process output includes calculating a variance of a prediction error for a processing performance and/or a probability for violating specification limits of the processing performance of the at least one process output. If the variance of the prediction error is calculated, the method also includes calculating a model health index. If the probability for violating specification limits is calculated, the method further includes calculating a process health index.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.