Automatic supervised classifier setup tool for semiconductor defects
US7359544B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Nov 13, 2003 |
| Grant date | Apr 15, 2008 |
| Priority date | — |
| Expiry date | Aug 1, 2026 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG06F18/40
- WIPO fieldComputer technology
- WIPO sectorElectrical engineering
Abstract
Disclosed are methods and apparatus for efficiently setting up and maintaining a defect classification system. In general terms, the setup procedure optionally includes automatically grouping a set of provided defects and presenting a representative set from each defect group to the user for classification. After the initial manual classification of the representative defects, the setup procedure includes an automatic procedure for classifying the non-reviewed or unclassified defects based on the manual class codes from the user-reviewed defects. After the automatic classification operation, the user may also be presented with defects from each class which may require re-classification. In particular embodiments, the user is iteratively presented with defects which have classifications that are suspect, which are near classification boundaries, or have classifications that have a low confidence level until each class is pure or contains a same type of defect classes as assigned by the user.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.