Anti-reflective coatings
US7361455B2 · kind B2 · utility
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5References
3Claims
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Key dates
| Filing date | Mar 31, 2004 |
| Grant date | Apr 22, 2008 |
| Priority date | — |
| Expiry date | Aug 21, 2024 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F7/40
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
Anti-reflective materials such as bottom anti-reflective coatings (BARC's) and sacrificial light absorbing materials (SLAM) may be made more effective at preventing coherent light or electron beam reflection from a substrate by including in the anti-reflective material an additive to alter the radiation beam path of the reflected light or electrons. The radiation beam path altering additive may be a reflective material or a refractive material. The inclusion of such a radiation beam bath altering additive may reduce line width roughness and increase critical dimension (CD) control of interconnect lines and vias.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.