Patent · US Expired

Optical system having an optical element that can be brought into at least two positions

US7362414B2 · kind B2 · utility

4Cited by

6References

45Claims

0Family size

Assignee

Carl Zeiss SMT GmbH · DE

Inventors

Wolfgang Singer · Aalen, DE
Joachim Hainz · Aalen, DE
Joachim Wietzorrek · Aalen, DE
Markus Weiss · Aalen, DE

Key dates

Filing date	Feb 24, 2005
Grant date	Apr 22, 2008
Priority date	—
Expiry date	Feb 24, 2025

Classification

Technology area (CPC G)Physics
CPC primaryG03F7/70975
WIPO fieldOptics
WIPO sectorInstruments

Abstract

There is provided an optical system including an optical element having a first used area and a second used area on which impinge rays of a light bundle, and a device for moving the optical element between a first position and a second position. The light bundle impinges on the first used area when the optical element is in the first position, and light bundle impinges on the second used area when the optical element is in the second position.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.