Patent · US Expired

Probe head having a membrane suspended probe

US7368927B2 · kind B2 · utility

45Cited by

823References

38Claims

0Family size

Assignee

Cascade Microtech, Inc. · US

Inventors

Kenneth R. Smith · Portland, US
Michael Jolley · Beaverton, US
Victoria Van Syckel · Rhododendron, US

Key dates

Filing date	Jul 5, 2005
Grant date	May 6, 2008
Priority date	—
Expiry date	Dec 5, 2025

Classification

Technology area (CPC G)Physics
CPC primaryG01R1/07371
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

A probe head including an elastic membrane capable of exerting a restoring force when one of the surfaces of the elastic membrane is distorted. A conductive probe includes a beam having a first end and a second end, with a probe tip proximate the first end for contacting a device under test. A beam contact proximate the second end of the beam. The beam being movable to deform at least one surface of the elastic membrane.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.