Surface defect inspection apparatus and surface defect inspection method
US7372557B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Aug 23, 2006 |
| Grant date | May 13, 2008 |
| Priority date | — |
| Expiry date | Aug 23, 2026 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N2021/9563
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
The present invention aims to provide a surface defect inspection apparatus and a surface defect inspection method for properly inspecting for a concave-shaped flaw (or a part thereof) substantially in parallel with a plane of incidence. The apparatus includes an illumination unit 10 illuminating a front surface (surface under inspection 5a) of an object to be inspected 5 with illumination light for inspection, a changing unit 1, 33 which relatively rotating the object to be inspected and the illumination unit around an axis AX1 perpendicular to the surface under inspection 5a and changing illumination conditions of the illumination light, a light reception unit 20 receiving scattered light emitted from the surface under inspection when illuminated with illumination light in each illumination condition, to capture images thereof, and a combining unit 32 combining images captured by the light reception unit to generate a combined image.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.