Patent · US Active

Reticle-masking objective with aspherical lenses

US7372634B2 · kind B2 · utility

0Cited by

10References

6Claims

0Family size

Assignee

Carl Zeiss SMT GmbH · DE

Inventors

Johannes Wangler · Oberkochen, DE
Karl-Heinz Schuster · Oberkochen, DE
Alexander Sohmer · Oberkochen, DE
Alexander Epple · Aalen, DE
Jorg Schultz · Aalen, DE
Jurgen Grunwald · Welzheim, DE

Key dates

Filing date	Sep 21, 2006
Grant date	May 13, 2008
Priority date	—
Expiry date	Sep 21, 2026

Classification

Technology area (CPC G)Physics
CPC primaryG03F7/70075
WIPO fieldOptics
WIPO sectorInstruments

Abstract

A reticle-masking (REMA) objective for imaging an object plane onto an image plane has a condenser portion, an intermediate portion, and a field lens portion. The three portions together have no more than 10 lenses with a combined total of no more than five aspheric lens surfaces. Each of the three portions of the REMA objective has one or two aspheric lens surfaces.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.