Methods and systems for detection of selected defects particularly in relatively noisy inspection data
US7373277B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | Jun 1, 2004 |
| Grant date | May 13, 2008 |
| Priority date | — |
| Expiry date | Jun 20, 2024 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG06T2207/30148
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Various methods and systems for detection of selected defects particularly in relatively noisy inspection data are provided. One method includes applying a spatial filter algorithm to raw inspection data acquired across an area on a substrate to determine a first portion of the raw inspection data that has a higher probability of being a selected type of defect than a second portion of the raw inspection data. The selected type of defect includes a non-point defect. The method also includes generating a raw two-dimensional map illustrating the first portion of the raw inspection data. In addition, the method includes searching the raw two-dimensional map for an event that has spatial characteristics that approximately match spatial characteristics of the selected type of defect. The method further includes determining if the event corresponds to a defect having the selected type.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.