Device and a process for the calibration of a semiconductor component test system
US7375508B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Jun 28, 2005 |
| Grant date | May 20, 2008 |
| Priority date | — |
| Expiry date | Apr 11, 2026 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG11C2029/5602
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A device and a process for the calibration of a semi-conductor component test systemThe invention relates to a process and a device for the calibration of a probe card and/or of a semi-conductor component test apparatus including a first connection, at which a corresponding signal, in particular a calibration signal can be applied, and a second connection, connected or connectable with the first connection, at which the signal, in particular the calibration signal, can be emitted, and a third connection, at which a corresponding further signal, in particular a calibration signal, can be applied, and a fourth connection, connected or connectable with the third connection, at which the further signal, in particular the calibration signal, can be emitted.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.