Removable heater
US7381926B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Sep 9, 2005 |
| Grant date | Jun 3, 2008 |
| Priority date | — |
| Expiry date | Apr 11, 2026 |
Classification
- Technology area (CPC F)Mechanical Engineering; Lighting; Heating
- CPC primaryF27D99/0006
- WIPO fieldThermal processes and apparatus
- WIPO sectorMechanical engineering
Abstract
A batch processing chamber comprising a top plate having at least one opening, and sidewalls, wherein the sidewalls and the top plate define a process volume. At least one removable heater is generally disposed in the process volume, wherein the at least one removable heater can be inserted or removed from the at least one opening of the top plate. In one embodiment, the at least one removable heater is resistive heater constructed in ceramic. In another embodiment, at least one heater container is disposed in the process volume via the at least one opening of the top plate and the at least one heater may operate in atmospheric conditions.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.