Charged particle beam apparatus and specimen holder
US7381968B2 · kind B2 · utility
17Cited by
3References
10Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Apr 14, 2005 |
| Grant date | Jun 3, 2008 |
| Priority date | — |
| Expiry date | Dec 27, 2025 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/208
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
Information of a specimen holder or information of a specimen mounted on the specimen holder is stored in a memory inside the specimen holder mounted to an electron microscope. The memory is accessed to transmit the information of the specimen holder to the electron microscope, thereby ensuring that the user can use the specimen holder without mistaking characteristics of the specimen holder and danger of erroneous recording of the specimen information can be reduced.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.