Probe manufacturing method, probe, and scanning probe microscope
US7388199B2 · kind B2 · utility
3Cited by
6References
17Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Sep 3, 2004 |
| Grant date | Jun 17, 2008 |
| Priority date | — |
| Expiry date | Sep 3, 2024 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01Q70/12
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A probe is made by attaching a carbon nanotube 12 to a mounting base end 13, which eliminates the effects of a carbon contamination film, to increase the bonding strength, increase the conductivity of the probe, and strengthen the bonding performance thereof by coating the entire circumference of the nanotube and the base with a coating film, rather than coating just one side. The work of mounting the carbon nanotube and mounting base end are performed under observation by a microscope. Further, the carbon contamination film 14 formed by an electron microscope is stripped off at a stage before bonding by the coating film.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.