Surface inspection apparatus and surface inspection method
US7403278B2 · kind B2 · utility
Assignees
Inventors
Key dates
| Filing date | May 29, 2007 |
| Grant date | Jul 22, 2008 |
| Priority date | — |
| Expiry date | May 29, 2027 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N2021/8841
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A surface inspection apparatus, for inspecting a plurality of surfaces formed in a peripheral edge portion of a plate-like object, includes a image pickup mechanism, which photographs the peripheral edge portion of the plate-like object having a plurality of surfaces, and an image processing device, which processes an image obtained by the photographing device. The image pickup mechanism includes an optical system which guides images of the plurality of surfaces of the plate-like object in one direction, and a camera unit having an image pickup surface, on which the images of the plurality of surfaces guided by the optical system in the one direction are formed.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.